Simple Laser Microinterferometer for Spaceborne Measurements

Simple Laser Microinterferometer for Spaceborne Measurements

Laser interferometer consists of laser, point-like mirror, forming aberration-free beam of light (reference beam), and analyzer beam reflecting by a mirror system to be tested. The analyzer beam is directed to viewing screen or CCD, and it is recombined with the reference beam to produce a system of...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Popov, G.M., Popov, E.G.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
interferometer
Interferometric lithography
Laser beams
Mirrors
Optical films
Optical interferometry
Optical receivers
Optical refraction
Optical sensors
optics
space
Testing
Ultraviolet sources
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Beschreibung
Zusammenfassung:Laser interferometer consists of laser, point-like mirror, forming aberration-free beam of light (reference beam), and analyzer beam reflecting by a mirror system to be tested. The analyzer beam is directed to viewing screen or CCD, and it is recombined with the reference beam to produce a system of Twyman-Green fringes. Microinterferometer is very small, simple and lightweight, that is why it is especially recommended for testing optics of the space telescopes in the space, and extreme UV lithography
DOI:10.1109/LFNM.2006.252014