Properties of SAW resonators fabricated on quartz substrates of various qualities

Properties of SAW resonators fabricated on quartz substrates of various qualities

The electrical properties of etched-groove Surface Acoustic Wave (SAW) resonators have been evaluated as functions of the SAW substrate's quartz quality and surface polish. Electrical properties tested include the as-fabricated un-sealed resonant frequency, sealing-induced frequency shift, inse...

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Hauptverfasser: Greer, J.A., Parker, T.E., Montress, G.K.
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Sprache:eng
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Frequency stability
Losses
Phase noise
Quartz materials/devices
Surface acoustic wave resonators
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creator Greer, J.A.
Parker, T.E.
Montress, G.K.
description The electrical properties of etched-groove Surface Acoustic Wave (SAW) resonators have been evaluated as functions of the SAW substrate's quartz quality and surface polish. Electrical properties tested include the as-fabricated un-sealed resonant frequency, sealing-induced frequency shift, insertion loss, residual phase noise, turnover temperature, and long-term frequency stability. The results indicate that quartz quality and surface polish can play roles in the as-fabricated resonators' electrical properties, specifically frequency, insertion loss, and quality factors, as well as the sealing-induced frequency shifts. However, electrical properties of SAW devices such as phase noise and long-term frequency stability do not appear to be strongly influenced by either the surface polish or the quality of the quartz substrate
doi_str_mv 10.1109/ULTSYM.1994.401548
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Electrical properties tested include the as-fabricated un-sealed resonant frequency, sealing-induced frequency shift, insertion loss, residual phase noise, turnover temperature, and long-term frequency stability. The results indicate that quartz quality and surface polish can play roles in the as-fabricated resonators' electrical properties, specifically frequency, insertion loss, and quality factors, as well as the sealing-induced frequency shifts. However, electrical properties of SAW devices such as phase noise and long-term frequency stability do not appear to be strongly influenced by either the surface polish or the quality of the quartz substrate</abstract><pub>IEEE</pub><doi>10.1109/ULTSYM.1994.401548</doi></addata></record>
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subjects Frequency stability
Losses
Phase noise
Quartz materials/devices
Surface acoustic wave resonators
title Properties of SAW resonators fabricated on quartz substrates of various qualities
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