Properties of SAW resonators fabricated on quartz substrates of various qualities

The electrical properties of etched-groove Surface Acoustic Wave (SAW) resonators have been evaluated as functions of the SAW substrate's quartz quality and surface polish. Electrical properties tested include the as-fabricated un-sealed resonant frequency, sealing-induced frequency shift, insertion loss, residual phase noise, turnover temperature, and long-term frequency stability. The results indicate that quartz quality and surface polish can play roles in the as-fabricated resonators' electrical properties, specifically frequency, insertion loss, and quality factors, as well as the sealing-induced frequency shifts. However, electrical properties of SAW devices such as phase noise and long-term frequency stability do not appear to be strongly influenced by either the surface polish or the quality of the quartz substrate