A Linearity Improvement Technique for Thin-film Barium Strontium Titanate Capacitors

A Linearity Improvement Technique for Thin-film Barium Strontium Titanate Capacitors

A device architecture is proposed to improve the linearity of barium strontium titanate (BST) capacitors while maintaining the tunability and the quality factor. Thin-film parallel plate capacitors are fabricated utilizing the proposed architecture. The measurement results successfully demonstrate t...

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Bibliographische Detailangaben
Hauptverfasser: Jia-Shiang Fu, Zhu, X.A., Ding-Yuan Chen, Phillips, J.D., Mortazawi, A.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Barium
Barium strontium titanate (BST)
Binary search trees
Capacitors
Electrodes
ferroelectric
Ferroelectric materials
intermodulation distortion
Linearity
Strontium
Titanium compounds
Transistors
tunable capacitor
Voltage
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Beschreibung
Zusammenfassung:A device architecture is proposed to improve the linearity of barium strontium titanate (BST) capacitors while maintaining the tunability and the quality factor. Thin-film parallel plate capacitors are fabricated utilizing the proposed architecture. The measurement results successfully demonstrate the effectiveness of this approach. Up to 14 dB of improvement on IIP3 is observed
ISSN:0149-645X
DOI:10.1109/MWSYM.2006.249654