Large-area ZnO films grown by photo-MOCVD and their application to a-Si solar cells

Large-area ZnO films grown by photo-MOCVD and their application to a-Si solar cells

Large-area ZnO films with high-transparency and high-conductivity were successfully grown on the 10/spl times/10 cm/sup 2/ substrates by the photo-MOCVD technique at a very low temperature of 135/spl deg/C. The films have a good uniformity in thickness, resistivity and crystallinity with a deviation...

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Hauptverfasser: Wenas, W.W., Yoshino, M., Tabuchi, K., Yamada, A., Konagai, M., Takahashi, K.
Format: Tagungsbericht
Sprache:eng
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Conductive films
Conductivity
Gases
Glass
Light sources
MOCVD
Photovoltaic cells
Plasma temperature
Surface morphology
Zinc oxide
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creator Wenas, W.W.
Yoshino, M.
Tabuchi, K.
Yamada, A.
Konagai, M.
Takahashi, K.
description Large-area ZnO films with high-transparency and high-conductivity were successfully grown on the 10/spl times/10 cm/sup 2/ substrates by the photo-MOCVD technique at a very low temperature of 135/spl deg/C. The films have a good uniformity in thickness, resistivity and crystallinity with a deviation level of 5%. The obtained ZnO films were applied to a-Si solar cells as a TCO and a conversion efficiency of as high as 12.0% (AM-1.5, area 3 mm/spl times/3 mm) was obtained.< >
doi_str_mv 10.1109/PVSC.1993.347095
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The films have a good uniformity in thickness, resistivity and crystallinity with a deviation level of 5%. The obtained ZnO films were applied to a-Si solar cells as a TCO and a conversion efficiency of as high as 12.0% (AM-1.5, area 3 mm/spl times/3 mm) was obtained.&lt; &gt;</description><identifier>ISBN: 0780312201</identifier><identifier>ISBN: 9780780312203</identifier><identifier>DOI: 10.1109/PVSC.1993.347095</identifier><language>eng</language><publisher>IEEE</publisher><subject>Conductive films ; Conductivity ; Gases ; Glass ; Light sources ; MOCVD ; Photovoltaic cells ; Plasma temperature ; Surface morphology ; Zinc oxide</subject><ispartof>Conference Record of the Twenty Third IEEE Photovoltaic Specialists Conference - 1993 (Cat. 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subjects Conductive films
Conductivity
Gases
Glass
Light sources
MOCVD
Photovoltaic cells
Plasma temperature
Surface morphology
Zinc oxide
title Large-area ZnO films grown by photo-MOCVD and their application to a-Si solar cells
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