Bulk InP technologies: InP against GaAs

Recently, the quality of InP bulk crystals has been greatly improved. In this paper, recent developments of InP crystal technologies are reviewed, including growth of large crystals, reduction of dislocation densities, preparation of undoped semi-insulating (SI) materials and polishing qualities. We...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Kohiro, K., Kainosho, K., Hirano, R., Uchida, M., Katsura, S., Kurita, H., Fukui, T., Oda, O.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Crystalline materials Gallium arsenide Indium phosphide Manufacturing Optical materials Photonic crystals Production Semiconductor materials Substrates Surface charging
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