Integrated force arrays

Integrated force arrays

Integrated force arrays (IFAs), which are flexible metallized membranes that can be patterned using the techniques of VLSI electronics and that undergo substantial deformation when voltage is applied, have been developed. They may be configured as macroscopic actuators or used in highly articulated...

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Bibliographische Detailangaben
Hauptverfasser: Bobbio, S.M., Kellam, M.D., Dudley, B.W., Goodwin-Johansson, S., Jones, S.K., Jacobson, J.D., Tranjan, F.M., DuBois, T.D.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Actuators
Biomembranes
Control systems
Electrostatics
Microelectronics
Microscopy
Optical arrays
Optical control
Polyimides
Voltage
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Beschreibung
Zusammenfassung:Integrated force arrays (IFAs), which are flexible metallized membranes that can be patterned using the techniques of VLSI electronics and that undergo substantial deformation when voltage is applied, have been developed. They may be configured as macroscopic actuators or used in highly articulated systems of great complexity. The theory of operation, the methods of construction, and the observational results for IFA test structures are presented.< >
DOI:10.1109/MEMSYS.1993.296931