The use of test masks in the analysis of device yields

The use of test masks in the analysis of device yields

A product specific test mask is used to analyze circuit yield and associate it with device parameter yield, which can then more easily be related to process failure. Once a consistent failure mode has been identified, it is found that a problem specific test mask is also required to finally effect a...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Rhodes, S.J., Day, G.C.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Circuit analysis
Circuit testing
Failure analysis
Information analysis
Integrated circuit interconnections
Low voltage
Manufacturing processes
Metallization
Production
Random access memory
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Beschreibung
Zusammenfassung:A product specific test mask is used to analyze circuit yield and associate it with device parameter yield, which can then more easily be related to process failure. Once a consistent failure mode has been identified, it is found that a problem specific test mask is also required to finally effect a solution. An example of this yield diagnosis methodology is described based on a nonvolatile static RAM (SRAM) circuit.< >
DOI:10.1109/ICMTS.1993.292920