Internal current probing of integrated circuits using magnetic force microscopy

A model for the magnetic force microscopy (MFM) imaging of IC currents is presented. MFM signal generation is described and the ability to analyze current direction and magnitude with a sensitivity of approximately 1 mA DC and approximately 1 mu A AC is demonstrated. Experimental results are a signi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Campbell, A.N., Cole, E.I., Dodd, B.A., Anderson, R.E.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	AC generators DC generators Electron beams Integrated circuit modeling Magnetic analysis Magnetic force microscopy Magnetic forces Signal analysis Signal generators Signal resolution
Online-Zugang:	Volltext bestellen
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