Internal current probing of integrated circuits using magnetic force microscopy

Internal current probing of integrated circuits using magnetic force microscopy

A model for the magnetic force microscopy (MFM) imaging of IC currents is presented. MFM signal generation is described and the ability to analyze current direction and magnitude with a sensitivity of approximately 1 mA DC and approximately 1 mu A AC is demonstrated. Experimental results are a signi...

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Bibliographische Detailangaben
Hauptverfasser: Campbell, A.N., Cole, E.I., Dodd, B.A., Anderson, R.E.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
AC generators
DC generators
Electron beams
Integrated circuit modeling
Magnetic analysis
Magnetic force microscopy
Magnetic forces
Signal analysis
Signal generators
Signal resolution
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Beschreibung
Zusammenfassung:A model for the magnetic force microscopy (MFM) imaging of IC currents is presented. MFM signal generation is described and the ability to analyze current direction and magnitude with a sensitivity of approximately 1 mA DC and approximately 1 mu A AC is demonstrated. Experimental results are a significant improvement over the 100 mA AC resolution previously reported using an electron beam to detect IC currents.< >
DOI:10.1109/RELPHY.1993.283328