Internal current probing of integrated circuits using magnetic force microscopy
A model for the magnetic force microscopy (MFM) imaging of IC currents is presented. MFM signal generation is described and the ability to analyze current direction and magnitude with a sensitivity of approximately 1 mA DC and approximately 1 mu A AC is demonstrated. Experimental results are a signi...
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| creator | Campbell, A.N. Cole, E.I. Dodd, B.A. Anderson, R.E. |
| description | A model for the magnetic force microscopy (MFM) imaging of IC currents is presented. MFM signal generation is described and the ability to analyze current direction and magnitude with a sensitivity of approximately 1 mA DC and approximately 1 mu A AC is demonstrated. Experimental results are a significant improvement over the 100 mA AC resolution previously reported using an electron beam to detect IC currents.< > |
| doi_str_mv | 10.1109/RELPHY.1993.283328 |
| format | Conference Proceeding |
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MFM signal generation is described and the ability to analyze current direction and magnitude with a sensitivity of approximately 1 mA DC and approximately 1 mu A AC is demonstrated. Experimental results are a significant improvement over the 100 mA AC resolution previously reported using an electron beam to detect IC currents.< ></description><identifier>ISBN: 0780307828</identifier><identifier>ISBN: 9780780307827</identifier><identifier>DOI: 10.1109/RELPHY.1993.283328</identifier><language>eng</language><publisher>IEEE</publisher><subject>AC generators ; DC generators ; Electron beams ; Integrated circuit modeling ; Magnetic analysis ; Magnetic force microscopy ; Magnetic forces ; Signal analysis ; Signal generators ; Signal resolution</subject><ispartof>31st Annual Proceedings Reliability Physics 1993, 1993, p.168-177</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/283328$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,776,780,785,786,2051,4035,4036,27904,54899</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/283328$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Campbell, A.N.</creatorcontrib><creatorcontrib>Cole, E.I.</creatorcontrib><creatorcontrib>Dodd, B.A.</creatorcontrib><creatorcontrib>Anderson, R.E.</creatorcontrib><title>Internal current probing of integrated circuits using magnetic force microscopy</title><title>31st Annual Proceedings Reliability Physics 1993</title><addtitle>RELPHY</addtitle><description>A model for the magnetic force microscopy (MFM) imaging of IC currents is presented. MFM signal generation is described and the ability to analyze current direction and magnitude with a sensitivity of approximately 1 mA DC and approximately 1 mu A AC is demonstrated. Experimental results are a significant improvement over the 100 mA AC resolution previously reported using an electron beam to detect IC currents.< ></description><subject>AC generators</subject><subject>DC generators</subject><subject>Electron beams</subject><subject>Integrated circuit modeling</subject><subject>Magnetic analysis</subject><subject>Magnetic force microscopy</subject><subject>Magnetic forces</subject><subject>Signal analysis</subject><subject>Signal generators</subject><subject>Signal resolution</subject><isbn>0780307828</isbn><isbn>9780780307827</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>1993</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotT8FqwzAUM4zBtq4_0JN_IJnt5yb2cZRuLQRaxnbYqTj2c_BokmI7h_79MjodJCSBQISsOCs5Z_rlY9scd98l1xpKoQCEuiNPrFYMZhLqgSxT-mEzlJg9fySH_ZAxDuZM7RQjDple4tiGoaOjp2HuumgyOmpDtFPIiU7pr-xNN2AOlvoxWqR9sHFMdrxcn8m9N-eEy39dkK-37edmVzSH9_3mtSkCr0UuWgWyrbV2yhgnBDD00klp1qyWay7BiTlpK4_aOQ1gtNdMVKri3lgDlYIFWd12AyKeLjH0Jl5Pt8vwC98-Tm0</recordid><startdate>1993</startdate><enddate>1993</enddate><creator>Campbell, A.N.</creator><creator>Cole, E.I.</creator><creator>Dodd, B.A.</creator><creator>Anderson, R.E.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>1993</creationdate><title>Internal current probing of integrated circuits using magnetic force microscopy</title><author>Campbell, A.N. ; Cole, E.I. ; Dodd, B.A. ; Anderson, R.E.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i172t-b834b799d8aad2230ef4d44a50745143d20efb6fe9dd933a9f9026861faca3683</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>1993</creationdate><topic>AC generators</topic><topic>DC generators</topic><topic>Electron beams</topic><topic>Integrated circuit modeling</topic><topic>Magnetic analysis</topic><topic>Magnetic force microscopy</topic><topic>Magnetic forces</topic><topic>Signal analysis</topic><topic>Signal generators</topic><topic>Signal resolution</topic><toplevel>online_resources</toplevel><creatorcontrib>Campbell, A.N.</creatorcontrib><creatorcontrib>Cole, E.I.</creatorcontrib><creatorcontrib>Dodd, B.A.</creatorcontrib><creatorcontrib>Anderson, R.E.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Campbell, A.N.</au><au>Cole, E.I.</au><au>Dodd, B.A.</au><au>Anderson, R.E.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Internal current probing of integrated circuits using magnetic force microscopy</atitle><btitle>31st Annual Proceedings Reliability Physics 1993</btitle><stitle>RELPHY</stitle><date>1993</date><risdate>1993</risdate><spage>168</spage><epage>177</epage><pages>168-177</pages><isbn>0780307828</isbn><isbn>9780780307827</isbn><abstract>A model for the magnetic force microscopy (MFM) imaging of IC currents is presented. MFM signal generation is described and the ability to analyze current direction and magnitude with a sensitivity of approximately 1 mA DC and approximately 1 mu A AC is demonstrated. Experimental results are a significant improvement over the 100 mA AC resolution previously reported using an electron beam to detect IC currents.< ></abstract><pub>IEEE</pub><doi>10.1109/RELPHY.1993.283328</doi><tpages>10</tpages></addata></record> |
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| identifier | ISBN: 0780307828 |
| ispartof | 31st Annual Proceedings Reliability Physics 1993, 1993, p.168-177 |
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| language | eng |
| recordid | cdi_ieee_primary_283328 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | AC generators DC generators Electron beams Integrated circuit modeling Magnetic analysis Magnetic force microscopy Magnetic forces Signal analysis Signal generators Signal resolution |
| title | Internal current probing of integrated circuits using magnetic force microscopy |
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