A SOM approach to the failure physics of optoelectronic devices
The use of optical beam induced current (OBIC) and photoluminescence (PL) implemented in a scanning optical microscope (SOM) for the study of the degradation mechanisms of optoelectronic devices is discussed. High sensitivity and spatial resolution in the localization of defects are demonstrated, un...
Gespeichert in:
Hauptverfasser: | , , , , , |
---|---|
Format: | Tagungsbericht |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The use of optical beam induced current (OBIC) and photoluminescence (PL) implemented in a scanning optical microscope (SOM) for the study of the degradation mechanisms of optoelectronic devices is discussed. High sensitivity and spatial resolution in the localization of defects are demonstrated, unique analytical schemes are described, and the cofocal photoluminescence (CPL) technique is introduced. Theoretical analysis and computations support the experimental results.< > |
---|---|
DOI: | 10.1109/RELPHY.1993.283271 |