Design and performance of UHF and L-band oscillators using thin-film resonators on semiconductor substrates

Design and performance of UHF and L-band oscillators using thin-film resonators on semiconductor substrates

The authors report on the use of sputter-deposited, thin-film, aluminum nitride resonators as the feedback element in hybrid single-mode, combline, and voltage-controlled UHF and L-band oscillators. The resonators have also been cointegrated on the same substrate with 2-GHz BJTs (bipolar junction tr...

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Hauptverfasser: Burns, S.G., Weber, R.J.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Filters
Frequency control
L-band
Piezoelectric films
Semiconductor thin films
Sputtering
State feedback
Substrates
Voltage-controlled oscillators
Zinc oxide
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Weber, R.J.
description The authors report on the use of sputter-deposited, thin-film, aluminum nitride resonators as the feedback element in hybrid single-mode, combline, and voltage-controlled UHF and L-band oscillators. The resonators have also been cointegrated on the same substrate with 2-GHz BJTs (bipolar junction transistors). Design techniques and suggestions for novel architectures using this technology are presented.< >
doi_str_mv 10.1109/MWSCAS.1991.252038
format Conference Proceeding
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The resonators have also been cointegrated on the same substrate with 2-GHz BJTs (bipolar junction transistors). 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The resonators have also been cointegrated on the same substrate with 2-GHz BJTs (bipolar junction transistors). Design techniques and suggestions for novel architectures using this technology are presented.&lt; &gt;</description><subject>Filters</subject><subject>Frequency control</subject><subject>L-band</subject><subject>Piezoelectric films</subject><subject>Semiconductor thin films</subject><subject>Sputtering</subject><subject>State feedback</subject><subject>Substrates</subject><subject>Voltage-controlled oscillators</subject><subject>Zinc oxide</subject><isbn>9780780306202</isbn><isbn>0780306201</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>1991</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotkMFKAzEYhAMiKLUv0FNeYGuy2U3yH0u1Vljx0IrHkk3-rdHdpCTbg2_vah0GBr6BOQwhC86WnDO4f3nfrVe7JQfgy7IumdBXZA5Ks8mCyZKVN2Se8yebVAnFRHlLvh4w-2OgJjh6wtTFNJhgkcaOvm03f7gp2t-I2fq-N2NMmZ6zD0c6fvhQdL4faMIcw6WKgWYcvI3Bne1EaD63eUxmxHxHrjvTZ5z_54zsN4_79bZoXp-e16um8BrGAiRXFVjjHNRWScZQq9pwhxKUrDgHZ2uouFAStQVbAdhOgXMa21K32ooZWVxmPSIeTskPJn0fLoeIH-ruWEk</recordid><startdate>1991</startdate><enddate>1991</enddate><creator>Burns, S.G.</creator><creator>Weber, R.J.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>1991</creationdate><title>Design and performance of UHF and L-band oscillators using thin-film resonators on semiconductor substrates</title><author>Burns, S.G. ; Weber, R.J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i89t-961749cadd95c7600e875a1de69764119dc5941376e8c9c499cf79dd8eb28b8c3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>1991</creationdate><topic>Filters</topic><topic>Frequency control</topic><topic>L-band</topic><topic>Piezoelectric films</topic><topic>Semiconductor thin films</topic><topic>Sputtering</topic><topic>State feedback</topic><topic>Substrates</topic><topic>Voltage-controlled oscillators</topic><topic>Zinc oxide</topic><toplevel>online_resources</toplevel><creatorcontrib>Burns, S.G.</creatorcontrib><creatorcontrib>Weber, R.J.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Burns, S.G.</au><au>Weber, R.J.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Design and performance of UHF and L-band oscillators using thin-film resonators on semiconductor substrates</atitle><btitle>[1991] Proceedings of the 34th Midwest Symposium on Circuits and Systems</btitle><stitle>MWSCAS</stitle><date>1991</date><risdate>1991</risdate><spage>307</spage><epage>310 vol.1</epage><pages>307-310 vol.1</pages><isbn>9780780306202</isbn><isbn>0780306201</isbn><abstract>The authors report on the use of sputter-deposited, thin-film, aluminum nitride resonators as the feedback element in hybrid single-mode, combline, and voltage-controlled UHF and L-band oscillators. 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ispartof [1991] Proceedings of the 34th Midwest Symposium on Circuits and Systems, 1991, p.307-310 vol.1
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subjects Filters
Frequency control
L-band
Piezoelectric films
Semiconductor thin films
Sputtering
State feedback
Substrates
Voltage-controlled oscillators
Zinc oxide
title Design and performance of UHF and L-band oscillators using thin-film resonators on semiconductor substrates
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