Numerical Technique for the Analysis of 3D MEMS Structures with Sinusoidal Motion

In this paper, the modeling technique of 3D MEMS structures with sinusoidal motion is proposed. This technique is a combination of the FDTD method and the body fitted grid generation technique. The numerical results of the field plot is shown for a MEMS capacitor with sinusoidal motion and demonstra...

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Hauptverfasser:	Mori, T., Iwamatsu, H., Kanno, T., Kuroda, M.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Capacitors Computer science Electromechanical devices Equations Fabrication Micromechanical devices Motion analysis Physics computing Radio frequency Switches
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creator	Mori, T. Iwamatsu, H. Kanno, T. Kuroda, M.
description	In this paper, the modeling technique of 3D MEMS structures with sinusoidal motion is proposed. This technique is a combination of the FDTD method and the body fitted grid generation technique. The numerical results of the field plot is shown for a MEMS capacitor with sinusoidal motion and demonstrate its unique computational advantages in the modeling of microwave devices and/or optical devices with moving boundaries
doi_str_mv	10.1109/APS.2006.1711449
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The numerical results of the field plot is shown for a MEMS capacitor with sinusoidal motion and demonstrate its unique computational advantages in the modeling of microwave devices and/or optical devices with moving boundaries</description><identifier>ISSN: 1522-3965</identifier><identifier>ISBN: 1424401232</identifier><identifier>ISBN: 9781424401239</identifier><identifier>EISSN: 1947-1491</identifier><identifier>DOI: 10.1109/APS.2006.1711449</identifier><language>eng</language><publisher>IEEE</publisher><subject>Capacitors ; Computer science ; Electromechanical devices ; Equations ; Fabrication ; Micromechanical devices ; Motion analysis ; Physics computing ; Radio frequency ; Switches</subject><ispartof>2006 IEEE Antennas and Propagation Society International Symposium, 2006, p.3793-3796</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1711449$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2058,4050,4051,27925,54920</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1711449$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Mori, T.</creatorcontrib><creatorcontrib>Iwamatsu, H.</creatorcontrib><creatorcontrib>Kanno, T.</creatorcontrib><creatorcontrib>Kuroda, M.</creatorcontrib><title>Numerical Technique for the Analysis of 3D MEMS Structures with Sinusoidal Motion</title><title>2006 IEEE Antennas and Propagation Society International Symposium</title><addtitle>APS</addtitle><description>In this paper, the modeling technique of 3D MEMS structures with sinusoidal motion is proposed. 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subjects	Capacitors Computer science Electromechanical devices Equations Fabrication Micromechanical devices Motion analysis Physics computing Radio frequency Switches
title	Numerical Technique for the Analysis of 3D MEMS Structures with Sinusoidal Motion
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