Numerical Technique for the Analysis of 3D MEMS Structures with Sinusoidal Motion

Numerical Technique for the Analysis of 3D MEMS Structures with Sinusoidal Motion

In this paper, the modeling technique of 3D MEMS structures with sinusoidal motion is proposed. This technique is a combination of the FDTD method and the body fitted grid generation technique. The numerical results of the field plot is shown for a MEMS capacitor with sinusoidal motion and demonstra...

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Hauptverfasser: Mori, T., Iwamatsu, H., Kanno, T., Kuroda, M.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Capacitors
Computer science
Electromechanical devices
Equations
Fabrication
Micromechanical devices
Motion analysis
Physics computing
Radio frequency
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Beschreibung
Zusammenfassung:In this paper, the modeling technique of 3D MEMS structures with sinusoidal motion is proposed. This technique is a combination of the FDTD method and the body fitted grid generation technique. The numerical results of the field plot is shown for a MEMS capacitor with sinusoidal motion and demonstrate its unique computational advantages in the modeling of microwave devices and/or optical devices with moving boundaries
ISSN:1522-3965
1947-1491
DOI:10.1109/APS.2006.1711449