Experimental and theoretical study of RF plasma at low and high frequency

A capacitive coupled radio-frequency plasma at argon pressure of 100 mtorr, 13.56 and 81 MHz frequency and high specific input powers has been studied both experimentally and theoretically. The different numerical models were developed and used for simulation. It was shown that the main ionization source in low frequency (LF) discharge at all studied powers is due to secondary electrons emitted from the electrode by ion impact. The high-frequency (HF) discharge at the same powers is operated in alpha-mode. Applicability of fluid and kinetic models for simulation of LF and HF discharges are studied on the base of our experimental data