Nanometer-Order Control of MEMS Ribbons for Blazed Grating Light Valves

Nanometer-Order Control of MEMS Ribbons for Blazed Grating Light Valves

The performance of grating light valve (GLV™) chips can be increased by optimizing their ribbon structures [ 1]. A GLV is a one-dimensional light modulator using diffraction that can be applied to a high definition display by scanning the second dimension. We applied blazed GLV, which diffracts in o...

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Hauptverfasser: Saruta, K., Kasai, H., Nishida, M., Yamaguchi, M., Ito, Y., Yamashita, K., Taguchi, A., Oniki, K., Tamada, H.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Displays
Gratings
Lighting control
Micromechanical devices
Optical control
Optical diffraction
Optical distortion
Optical modulation
Silicon compounds
Valves
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Beschreibung
Zusammenfassung:The performance of grating light valve (GLV™) chips can be increased by optimizing their ribbon structures [ 1]. A GLV is a one-dimensional light modulator using diffraction that can be applied to a high definition display by scanning the second dimension. We applied blazed GLV, which diffracts in only one direction [ 2], and achieved a jump in contrast from 3000:1 to 10000:1. Moreover, we achieved a 55 to 70% improvement in optical efficiency due to nanometer-order control of blazed GLV ribbon. These technologies were applied to the 2005-inch theater system " GxL™ Laser Dream Theater†[ 3, 4].
ISSN:1084-6999
DOI:10.1109/MEMSYS.2006.1627931