A MEMS resonant strain sensor with 33 nano-strain resolution in a 10 kHz bandwidth

In this paper the authors demonstrate a high performance strain measurement system that consists of a polysilicon double ended tuning fork (DETF) resonant sensor and surface mount electronics to measure its output. This system achieves a resolution of 33 nano-strain (nepsiv) in a bandwidth of 10 kHz...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Wojciechowski, K.E., Boser, B.E., Pisano, A.P.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Bandwidth Capacitive sensors Counting circuits Frequency modulation Micromechanical devices Phase locked loops Resonance Resonant frequency Strain measurement Voltage-controlled oscillators
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