Selective Area Epitaxy of InGaAs Quantum Dots for Optoelectronic Device Integration
We demonstrate that selective-area-epitaxy can be used to selectively tune the properties of InGaAs quantum-dots in different regions of the same wafer. We report single step, MOCVD growth of different sized dots, luminescing at wavelengths spread over a range of 100 nm
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Format: | Tagungsbericht |
Sprache: | eng |
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Zusammenfassung: | We demonstrate that selective-area-epitaxy can be used to selectively tune the properties of InGaAs quantum-dots in different regions of the same wafer. We report single step, MOCVD growth of different sized dots, luminescing at wavelengths spread over a range of 100 nm |
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DOI: | 10.1109/COMMAD.2004.1577543 |