Selective Area Epitaxy of InGaAs Quantum Dots for Optoelectronic Device Integration

We demonstrate that selective-area-epitaxy can be used to selectively tune the properties of InGaAs quantum-dots in different regions of the same wafer. We report single step, MOCVD growth of different sized dots, luminescing at wavelengths spread over a range of 100 nm

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Hauptverfasser: Mokkapati, S., Lever, P., Tan, H.H., Jagadish, C., McBean, K.E., Phillips, M.R.
Format: Tagungsbericht
Sprache:eng
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Zusammenfassung:We demonstrate that selective-area-epitaxy can be used to selectively tune the properties of InGaAs quantum-dots in different regions of the same wafer. We report single step, MOCVD growth of different sized dots, luminescing at wavelengths spread over a range of 100 nm
DOI:10.1109/COMMAD.2004.1577543