Organic-Inorganic Hybrid Materials Based Planar Lightwave Circuit

Planar lightwave circuit (PLC) was demonstrated using organic-inorganic hybrid materials and a photolithography technique. The photolithographic process was implemented for waveguide patterning, and it has the advantage of potential mass production with fully automatic process. Thermal and optical c...

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Hauptverfasser: Tien, Pei, Jang, Guang-Way, Lin, Ya-Hui, Tsai, I.-Chia, Hsu, Kuo-Yuan, Wu, Yu-Zhi, Lin, J.Y., Chu, A.K.
Format: Tagungsbericht
Sprache:eng
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Zusammenfassung:Planar lightwave circuit (PLC) was demonstrated using organic-inorganic hybrid materials and a photolithography technique. The photolithographic process was implemented for waveguide patterning, and it has the advantage of potential mass production with fully automatic process. Thermal and optical characterizations of waveguide materials were carried out and the results are presented in this paper
DOI:10.1109/COMMAD.2004.1577531