Miniaturized angular rate sensor with laminated quartz tuning fork

Miniaturized angular rate sensor with laminated quartz tuning fork

We have developed a small surface mount type angular rate sensor (5.0times3.2times1.3mm) with a miniaturized quartz tuning fork sensor element (3.7times0.94times0.24mm) which was manufactured from a laminated quartz wafers. The miniaturized new sensor indicated the following results. 1) Sensitivity...

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Hauptverfasser: Uehara, H., Ohtsuka, T., Inoue, T., Yoshimatu, M., Matudo, H., Okazaki, M., Dempa, N.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Angular velocity
Arm
Circuit stability
Control systems
Electrodes
Piezoelectric effect
Satellite navigation systems
Sensor systems
Vehicles
Vibrations
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Zusammenfassung:We have developed a small surface mount type angular rate sensor (5.0times3.2times1.3mm) with a miniaturized quartz tuning fork sensor element (3.7times0.94times0.24mm) which was manufactured from a laminated quartz wafers. The miniaturized new sensor indicated the following results. 1) Sensitivity : 0.64mV/deg/sec. 2) Zero point voltage : 1.47V. 3) Maximum angular velocity : +/- 180deg/sec
ISSN:2327-1914
DOI:10.1109/FREQ.2005.1574050