The physics and limits of femtosecond laser micromachining

The physics and limits of femtosecond laser micromachining

Laser-induced optical breakdown by femtosecond pulses is extraordinarily precise when the energy is near threshold. We examine the limits of femtosecond machining through studies of damage induced by tightly focused pulses in a variety of materials.

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Ke, K., Joglekar, A.P., Hsiao-hua Liu, Meyhofer, E., Hasselbrink, E., Mourou, G., Hunt, A.J.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Electric breakdown
Electrons
Ionization
Laser theory
Machining
Micromachining
Optical materials
Photonic band gap
Physics
Ultrafast optics
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Laser-induced optical breakdown by femtosecond pulses is extraordinarily precise when the energy is near threshold. We examine the limits of femtosecond machining through studies of damage induced by tightly focused pulses in a variety of materials.
DOI:10.1109/CLEO.2005.202317