Mapping the optical properties of SOI-type photonic crystal waveguides

In this article, we report on systematic mapping of the transmission properties of W1 waveguides as a function of the hole radius, slab thickness, and crystal length. Silicon-on-insulator (SOI) 200 mm diameter unibond wafers were patterned with electron beam lithography and processed on a 200 mm CMO...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Dulkeith, E., McNab, S.J., Vlasov, Yu.A.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	CMOS process Electron beams Electron optics Etching Fabrication Lithography Optical waveguides Photonic crystals Silicon on insulator technology Slabs
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