Mapping the optical properties of SOI-type photonic crystal waveguides

In this article, we report on systematic mapping of the transmission properties of W1 waveguides as a function of the hole radius, slab thickness, and crystal length. Silicon-on-insulator (SOI) 200 mm diameter unibond wafers were patterned with electron beam lithography and processed on a 200 mm CMOS fabrication line. A periodic array of holes was etched through the slab. The waveguide was defined by omitting one row of holes from the photonic crystal lattice