Mapping the optical properties of SOI-type photonic crystal waveguides
In this article, we report on systematic mapping of the transmission properties of W1 waveguides as a function of the hole radius, slab thickness, and crystal length. Silicon-on-insulator (SOI) 200 mm diameter unibond wafers were patterned with electron beam lithography and processed on a 200 mm CMO...
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| creator | Dulkeith, E. McNab, S.J. Vlasov, Yu.A. |
| description | In this article, we report on systematic mapping of the transmission properties of W1 waveguides as a function of the hole radius, slab thickness, and crystal length. Silicon-on-insulator (SOI) 200 mm diameter unibond wafers were patterned with electron beam lithography and processed on a 200 mm CMOS fabrication line. A periodic array of holes was etched through the slab. The waveguide was defined by omitting one row of holes from the photonic crystal lattice |
| doi_str_mv | 10.1109/CLEOE.2005.1568366 |
| format | Conference Proceeding |
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Silicon-on-insulator (SOI) 200 mm diameter unibond wafers were patterned with electron beam lithography and processed on a 200 mm CMOS fabrication line. A periodic array of holes was etched through the slab. 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Silicon-on-insulator (SOI) 200 mm diameter unibond wafers were patterned with electron beam lithography and processed on a 200 mm CMOS fabrication line. A periodic array of holes was etched through the slab. 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Silicon-on-insulator (SOI) 200 mm diameter unibond wafers were patterned with electron beam lithography and processed on a 200 mm CMOS fabrication line. A periodic array of holes was etched through the slab. The waveguide was defined by omitting one row of holes from the photonic crystal lattice</abstract><pub>IEEE</pub><doi>10.1109/CLEOE.2005.1568366</doi></addata></record> |
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| language | eng |
| recordid | cdi_ieee_primary_1568366 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | CMOS process Electron beams Electron optics Etching Fabrication Lithography Optical waveguides Photonic crystals Silicon on insulator technology Slabs |
| title | Mapping the optical properties of SOI-type photonic crystal waveguides |
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