Optical distributions using low-loss submicron rib SOI structures
Silicon-on-insulator (SOI) substrates have generated an increasing interest in the recent years, for both microelectronic and microphotonic applications. SOI substrates allow a strong integration density of optical devices. In this paper, experimental results concerning the passive optical SOI devic...
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| creator | Vivien, L. Marris, D. Rouviere, M. Lardenois, S. Laval, S. Pascal, D. Cassan, E. Fedeli, J.M. El Melhaoui, L. |
| description | Silicon-on-insulator (SOI) substrates have generated an increasing interest in the recent years, for both microelectronic and microphotonic applications. SOI substrates allow a strong integration density of optical devices. In this paper, experimental results concerning the passive optical SOI devices (grating couplers, rib waveguides, compact T-splitter, corner mirrors) and 16 optical distributions suitable for intrachip optical interconnects will be presented. |
| doi_str_mv | 10.1109/CLEOE.2005.1568285 |
| format | Conference Proceeding |
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SOI substrates allow a strong integration density of optical devices. In this paper, experimental results concerning the passive optical SOI devices (grating couplers, rib waveguides, compact T-splitter, corner mirrors) and 16 optical distributions suitable for intrachip optical interconnects will be presented.</abstract><pub>IEEE</pub><doi>10.1109/CLEOE.2005.1568285</doi></addata></record> |
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| ispartof | CLEO/Europe. 2005 Conference on Lasers and Electro-Optics Europe, 2005, 2005, p.507 |
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| language | eng |
| recordid | cdi_ieee_primary_1568285 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Electromagnetic waveguides Microelectronics Mirrors Optical devices Optical films Optical interconnections Optical microscopy Optical recording Optical sensors Optical waveguides |
| title | Optical distributions using low-loss submicron rib SOI structures |
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