Optical distributions using low-loss submicron rib SOI structures

Optical distributions using low-loss submicron rib SOI structures

Silicon-on-insulator (SOI) substrates have generated an increasing interest in the recent years, for both microelectronic and microphotonic applications. SOI substrates allow a strong integration density of optical devices. In this paper, experimental results concerning the passive optical SOI devic...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Vivien, L., Marris, D., Rouviere, M., Lardenois, S., Laval, S., Pascal, D., Cassan, E., Fedeli, J.M., El Melhaoui, L.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Electromagnetic waveguides
Microelectronics
Mirrors
Optical devices
Optical films
Optical interconnections
Optical microscopy
Optical recording
Optical sensors
Optical waveguides
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Silicon-on-insulator (SOI) substrates have generated an increasing interest in the recent years, for both microelectronic and microphotonic applications. SOI substrates allow a strong integration density of optical devices. In this paper, experimental results concerning the passive optical SOI devices (grating couplers, rib waveguides, compact T-splitter, corner mirrors) and 16 optical distributions suitable for intrachip optical interconnects will be presented.
DOI:10.1109/CLEOE.2005.1568285