A heterodyne interferometric ellipsometer

A heterodyne interferometric ellipsometer

Here we describe a heterodyne interferometric ellipsometer that uses an inexpensive semiconductor laser diode as the source. Small wavelength changes caused by modulating the bias current are converted into temporal fringes by arranging the two arms of the interferometer to be of unequal length. Mea...

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Hauptverfasser: Watkins, L.R., Hoogerland, M.D.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Arm
Atomic measurements
Diode lasers
Glass
Instruments
Optical films
Optical interferometry
Optical polarization
Refractive index
Voltage
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description Here we describe a heterodyne interferometric ellipsometer that uses an inexpensive semiconductor laser diode as the source. Small wavelength changes caused by modulating the bias current are converted into temporal fringes by arranging the two arms of the interferometer to be of unequal length. Measurements show that the optical properties of a variety of samples can be determined with high accuracy.
doi_str_mv 10.1109/CLEOE.2005.1568231
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fullrecord <record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_1568231</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>1568231</ieee_id><sourcerecordid>1568231</sourcerecordid><originalsourceid>FETCH-LOGICAL-i90t-48b7616214b6ebed706e60829e327efbbaf67f10c39dd87465cae9d6b9dad4bf3</originalsourceid><addsrcrecordid>eNotjztrwzAUhQWh0DTNH2gWrx3sXj18JY3BuA8wZMkeJOuKKDgPZC_593VpzvKdbzlwGHvjUHEO9qPp2l1bCYC64jUaIfmCvYA2II3VSj6z9TieYI60tUS7ZO_b4kgT5Wu4X6hIl7nG2c405dQXNAzpNv4Z5Vf2FN0w0vrBFdt_tvvmu-x2Xz_NtiuThalUxmvkKLjySJ6CBiQEIyxJoSl67yLqyKGXNgSjFda9IxvQ2-CC8lGu2OZ_NhHR4ZbT2eX74XFG_gIcKkCZ</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>A heterodyne interferometric ellipsometer</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Watkins, L.R. ; Hoogerland, M.D.</creator><creatorcontrib>Watkins, L.R. ; Hoogerland, M.D.</creatorcontrib><description>Here we describe a heterodyne interferometric ellipsometer that uses an inexpensive semiconductor laser diode as the source. Small wavelength changes caused by modulating the bias current are converted into temporal fringes by arranging the two arms of the interferometer to be of unequal length. Measurements show that the optical properties of a variety of samples can be determined with high accuracy.</description><identifier>ISBN: 0780389743</identifier><identifier>ISBN: 9780780389748</identifier><identifier>DOI: 10.1109/CLEOE.2005.1568231</identifier><language>eng</language><publisher>IEEE</publisher><subject>Arm ; Atomic measurements ; Diode lasers ; Glass ; Instruments ; Optical films ; Optical interferometry ; Optical polarization ; Refractive index ; Voltage</subject><ispartof>CLEO/Europe. 2005 Conference on Lasers and Electro-Optics Europe, 2005, 2005, p.453</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1568231$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2058,4050,4051,27925,54920</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1568231$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Watkins, L.R.</creatorcontrib><creatorcontrib>Hoogerland, M.D.</creatorcontrib><title>A heterodyne interferometric ellipsometer</title><title>CLEO/Europe. 2005 Conference on Lasers and Electro-Optics Europe, 2005</title><addtitle>CLEOE</addtitle><description>Here we describe a heterodyne interferometric ellipsometer that uses an inexpensive semiconductor laser diode as the source. Small wavelength changes caused by modulating the bias current are converted into temporal fringes by arranging the two arms of the interferometer to be of unequal length. Measurements show that the optical properties of a variety of samples can be determined with high accuracy.</description><subject>Arm</subject><subject>Atomic measurements</subject><subject>Diode lasers</subject><subject>Glass</subject><subject>Instruments</subject><subject>Optical films</subject><subject>Optical interferometry</subject><subject>Optical polarization</subject><subject>Refractive index</subject><subject>Voltage</subject><isbn>0780389743</isbn><isbn>9780780389748</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2005</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotjztrwzAUhQWh0DTNH2gWrx3sXj18JY3BuA8wZMkeJOuKKDgPZC_593VpzvKdbzlwGHvjUHEO9qPp2l1bCYC64jUaIfmCvYA2II3VSj6z9TieYI60tUS7ZO_b4kgT5Wu4X6hIl7nG2c405dQXNAzpNv4Z5Vf2FN0w0vrBFdt_tvvmu-x2Xz_NtiuThalUxmvkKLjySJ6CBiQEIyxJoSl67yLqyKGXNgSjFda9IxvQ2-CC8lGu2OZ_NhHR4ZbT2eX74XFG_gIcKkCZ</recordid><startdate>2005</startdate><enddate>2005</enddate><creator>Watkins, L.R.</creator><creator>Hoogerland, M.D.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>2005</creationdate><title>A heterodyne interferometric ellipsometer</title><author>Watkins, L.R. ; Hoogerland, M.D.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i90t-48b7616214b6ebed706e60829e327efbbaf67f10c39dd87465cae9d6b9dad4bf3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2005</creationdate><topic>Arm</topic><topic>Atomic measurements</topic><topic>Diode lasers</topic><topic>Glass</topic><topic>Instruments</topic><topic>Optical films</topic><topic>Optical interferometry</topic><topic>Optical polarization</topic><topic>Refractive index</topic><topic>Voltage</topic><toplevel>online_resources</toplevel><creatorcontrib>Watkins, L.R.</creatorcontrib><creatorcontrib>Hoogerland, M.D.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Watkins, L.R.</au><au>Hoogerland, M.D.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>A heterodyne interferometric ellipsometer</atitle><btitle>CLEO/Europe. 2005 Conference on Lasers and Electro-Optics Europe, 2005</btitle><stitle>CLEOE</stitle><date>2005</date><risdate>2005</risdate><spage>453</spage><pages>453-</pages><isbn>0780389743</isbn><isbn>9780780389748</isbn><abstract>Here we describe a heterodyne interferometric ellipsometer that uses an inexpensive semiconductor laser diode as the source. Small wavelength changes caused by modulating the bias current are converted into temporal fringes by arranging the two arms of the interferometer to be of unequal length. Measurements show that the optical properties of a variety of samples can be determined with high accuracy.</abstract><pub>IEEE</pub><doi>10.1109/CLEOE.2005.1568231</doi></addata></record>
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subjects Arm
Atomic measurements
Diode lasers
Glass
Instruments
Optical films
Optical interferometry
Optical polarization
Refractive index
Voltage
title A heterodyne interferometric ellipsometer
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-27T03%3A39%3A51IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=A%20heterodyne%20interferometric%20ellipsometer&rft.btitle=CLEO/Europe.%202005%20Conference%20on%20Lasers%20and%20Electro-Optics%20Europe,%202005&rft.au=Watkins,%20L.R.&rft.date=2005&rft.spage=453&rft.pages=453-&rft.isbn=0780389743&rft.isbn_list=9780780389748&rft_id=info:doi/10.1109/CLEOE.2005.1568231&rft_dat=%3Cieee_6IE%3E1568231%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=1568231&rfr_iscdi=true