A heterodyne interferometric ellipsometer

A heterodyne interferometric ellipsometer

Here we describe a heterodyne interferometric ellipsometer that uses an inexpensive semiconductor laser diode as the source. Small wavelength changes caused by modulating the bias current are converted into temporal fringes by arranging the two arms of the interferometer to be of unequal length. Mea...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Watkins, L.R., Hoogerland, M.D.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Arm
Atomic measurements
Diode lasers
Glass
Instruments
Optical films
Optical interferometry
Optical polarization
Refractive index
Voltage
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Beschreibung
Zusammenfassung:Here we describe a heterodyne interferometric ellipsometer that uses an inexpensive semiconductor laser diode as the source. Small wavelength changes caused by modulating the bias current are converted into temporal fringes by arranging the two arms of the interferometer to be of unequal length. Measurements show that the optical properties of a variety of samples can be determined with high accuracy.
DOI:10.1109/CLEOE.2005.1568231