Resonator probe for near-field scanning microwave microscope

Resonator probe, operating at 35.7 GHz and based on the connected cavity and coaxial resonators, has been developed. Sample insertion in a field of the probe results in simultaneous change of resonance frequency and Q-factor of the resonator that allows to determine characteristics of the sample analyzed. On the basis of described resonator probe the model prototype of a near-field scanning microwave microscope for local contactless micro-diagnostics of physicomechanical, electric and photo-electric properties of substances, including semiconductors, dielectric materials, conductors and superconducting materials, and also sandwich structures on their basis has been created