Designs of applicators of a microwave plasmatrones for technological application
A classification of microwave plasmatrones for technological application accomplished in view of the design features of microwave applicators is submitted. The specific features of typical designs of microwave applicators of the electrode and non-electrode types were considered. The developed classi...
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Format: | Tagungsbericht |
Sprache: | eng |
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Zusammenfassung: | A classification of microwave plasmatrones for technological application accomplished in view of the design features of microwave applicators is submitted. The specific features of typical designs of microwave applicators of the electrode and non-electrode types were considered. The developed classification of microwave plasmatrones in view of the design-technical characteristics of microwave energy applicators will be useful not only at the stage of studying and analyzing well-known technical variants of the given type plasma sources, but also at the design stage and while choosing the type of plasma source to solve certain technical problems |
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DOI: | 10.1109/CRMICO.2005.1565084 |