Retention characteristics of zero-capacitor RAM (Z-RAM) cell based on FinFET and tri-gate devices
In this paper we experimentally study for the first time the retention characteristics of Z-RAM cells based on CMOS FinFET and tri-gate devices. A retention time of few milliseconds is measured at room temperature on 100 nm devices. This FinFET based Z-RAM memory will allow manufacturing of very low...
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Format: | Tagungsbericht |
Sprache: | eng |
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Zusammenfassung: | In this paper we experimentally study for the first time the retention characteristics of Z-RAM cells based on CMOS FinFET and tri-gate devices. A retention time of few milliseconds is measured at room temperature on 100 nm devices. This FinFET based Z-RAM memory will allow manufacturing of very low cost DRAMs and eDRAMs for 45 and sub 45-nm generations. |
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ISSN: | 1078-621X 2577-2295 |
DOI: | 10.1109/SOI.2005.1563588 |