Tuning of MEMS devices using Evolutionary Computation and Open-Loop Frequency Response

Tuning of MEMS devices using Evolutionary Computation and Open-Loop Frequency Response

We propose a tuning method for MEMS gyroscopes based on evolutionary computation that has the capacity to efficiently increase the sensitivity of MEMS gyroscopes through tuning and, furthermore, to find the optimally tuned configuration for this state of increased sensitivity. The tuning method was...

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Bibliographische Detailangaben
Hauptverfasser: Keymeulen, D., Fink, W., Ferguson, M.I., Peay, C., Oks, B., Terrile, R., Yee, K.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Evolutionary computation
Frequency measurement
Frequency response
Gyroscopes
Microelectromechanical devices
Micromechanical devices
Resonance
Testing
Tuning
Voltage
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Beschreibung
Zusammenfassung:We propose a tuning method for MEMS gyroscopes based on evolutionary computation that has the capacity to efficiently increase the sensitivity of MEMS gyroscopes through tuning and, furthermore, to find the optimally tuned configuration for this state of increased sensitivity. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation
ISSN:1095-323X
2996-2358
DOI:10.1109/AERO.2005.1559562