SAW resonators on ceramics with controlled piezoelectric properties
The paper presents the works carried out in order to obtain SAW devices on ceramic substrates with controlled piezoelectric properties. As ceramics, two different perovskite type systems were chosen: lead titanate with rare earths substitutions and substituted lead titanate zirconate. The resonant f...
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Format: | Tagungsbericht |
Sprache: | eng |
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Zusammenfassung: | The paper presents the works carried out in order to obtain SAW devices on ceramic substrates with controlled piezoelectric properties. As ceramics, two different perovskite type systems were chosen: lead titanate with rare earths substitutions and substituted lead titanate zirconate. The resonant frequency resulting from measurements on 12 resonators is distributed in a narrow range centred on 9 MHz. A very important limiting parameter is the roughness of the substrate and a comparison between two ceramics with different surface polishing degrees is made. |
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ISSN: | 1545-827X 2377-0678 |
DOI: | 10.1109/SMICND.2005.1558719 |