Oxide-confined high index contrast ridge waveguide curved resonator laser diodes

Oxide-confined high index contrast ridge waveguide curved resonator laser diodes

A simple, novel self-aligned deeply-etched plus wet thermally oxidized ridge waveguide fabrication process is demonstrated which enables high-index-contrast, low loss curved resonator GRINSCH lasers with a bend radius as low as 10 /spl mu/m.

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Bibliographische Detailangaben
Hauptverfasser: Di Liang, Jusong Wang, Hall, D.C.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Diode lasers
Geometrical optics
Laser modes
Optical pulses
Optical resonators
Optical scattering
Optical waveguides
Oxidation
Semiconductor lasers
Waveguide lasers
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Beschreibung
Zusammenfassung:A simple, novel self-aligned deeply-etched plus wet thermally oxidized ridge waveguide fabrication process is demonstrated which enables high-index-contrast, low loss curved resonator GRINSCH lasers with a bend radius as low as 10 /spl mu/m.
ISSN:1092-8081
2766-1733
DOI:10.1109/LEOS.2005.1548322