Polymeric microring resonator using nanoimprint technique based on a stamp incorporating a smoothing buffer layer

A polymeric microring resonator was fabricated using the nanoimprint technique based on a stamp incorporating a smoothing layer. The waveguide scattering loss was greatly reduced to provide for a quality factor of ~103800

Bibliographische Detailangaben

Hauptverfasser:	Do-Hwan Kim, Jung-Gyu Im, Sang-Shin Lee, Seh-Won Ahn, Ki-Dong Lee
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Buffer layers Light scattering Optical coupling Optical losses Particle scattering Polymers Q factor Rough surfaces Smoothing methods Surface roughness
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