Polymeric microring resonator using nanoimprint technique based on a stamp incorporating a smoothing buffer layer

Polymeric microring resonator using nanoimprint technique based on a stamp incorporating a smoothing buffer layer

A polymeric microring resonator was fabricated using the nanoimprint technique based on a stamp incorporating a smoothing layer. The waveguide scattering loss was greatly reduced to provide for a quality factor of ~103800

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Bibliographische Detailangaben
Hauptverfasser: Do-Hwan Kim, Jung-Gyu Im, Sang-Shin Lee, Seh-Won Ahn, Ki-Dong Lee
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Buffer layers
Light scattering
Optical coupling
Optical losses
Particle scattering
Polymers
Q factor
Rough surfaces
Smoothing methods
Surface roughness
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Beschreibung
Zusammenfassung:A polymeric microring resonator was fabricated using the nanoimprint technique based on a stamp incorporating a smoothing layer. The waveguide scattering loss was greatly reduced to provide for a quality factor of ~103800
ISSN:1092-8081
2766-1733
DOI:10.1109/LEOS.2005.1548186