Long-term hermeticity and biological performance of anodically bonded glass-silicon implantable packages

This paper reviews long-term test results obtained from a series of tests on glass-silicon (Si) hermetically sealed packages. Results are presented from 1) a 9.9-year ongoing room temperature phosphate-buffered saline (PBS) soak test of four packages; 2) accelerated soak tests in high temperature sa...

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Veröffentlicht in:IEEE transactions on device and materials reliability 2005-09, Vol.5 (3), p.458-466
Hauptverfasser: Harpster, T.J., Nikles, S.A., Dokmeci, M.R., Najafi, K.
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container_issue 3
container_start_page 458
container_title IEEE transactions on device and materials reliability
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creator Harpster, T.J.
Nikles, S.A.
Dokmeci, M.R.
Najafi, K.
description This paper reviews long-term test results obtained from a series of tests on glass-silicon (Si) hermetically sealed packages. Results are presented from 1) a 9.9-year ongoing room temperature phosphate-buffered saline (PBS) soak test of four packages; 2) accelerated soak tests in high temperature saline of 28 samples resulting in an extrapolated mean-time-to-failure (MTTF) at 37/spl deg/C of 177 years; 3) a 2.7-year in vitro 97/spl deg/C PBS soak test of a single package; and 4) in situ hermeticity and biocompatibility tests from 12 packages implanted in four guinea pigs-three packages implanted in two guinea pigs (each) for 1 month and another two guinea pigs for 20 and 22 months. All of the packages remained hermetically sealed over the lifetime of the implant. A detailed histological report of the implants is provided suggesting that they elicit no profound adverse reaction from the body.
doi_str_mv 10.1109/TDMR.2005.854374
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Results are presented from 1) a 9.9-year ongoing room temperature phosphate-buffered saline (PBS) soak test of four packages; 2) accelerated soak tests in high temperature saline of 28 samples resulting in an extrapolated mean-time-to-failure (MTTF) at 37/spl deg/C of 177 years; 3) a 2.7-year in vitro 97/spl deg/C PBS soak test of a single package; and 4) in situ hermeticity and biocompatibility tests from 12 packages implanted in four guinea pigs-three packages implanted in two guinea pigs (each) for 1 month and another two guinea pigs for 20 and 22 months. All of the packages remained hermetically sealed over the lifetime of the implant. A detailed histological report of the implants is provided suggesting that they elicit no profound adverse reaction from the body.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/TDMR.2005.854374</doi><tpages>9</tpages></addata></record>
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source IEEE Electronic Library (IEL)
subjects Biocompatibility
Biocompatible package
Bonding
Glass
hermetic package
Hermetic seals
Implants
in vivo testing
Integrated circuit packaging
microsystems packages
Rough surfaces
Surface roughness
Temperature
Testing
Thermal management
title Long-term hermeticity and biological performance of anodically bonded glass-silicon implantable packages
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