Long-term hermeticity and biological performance of anodically bonded glass-silicon implantable packages

This paper reviews long-term test results obtained from a series of tests on glass-silicon (Si) hermetically sealed packages. Results are presented from 1) a 9.9-year ongoing room temperature phosphate-buffered saline (PBS) soak test of four packages; 2) accelerated soak tests in high temperature sa...

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Veröffentlicht in:IEEE transactions on device and materials reliability 2005-09, Vol.5 (3), p.458-466
Hauptverfasser: Harpster, T.J., Nikles, S.A., Dokmeci, M.R., Najafi, K.
Format: Magazinearticle
Sprache:eng
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Zusammenfassung:This paper reviews long-term test results obtained from a series of tests on glass-silicon (Si) hermetically sealed packages. Results are presented from 1) a 9.9-year ongoing room temperature phosphate-buffered saline (PBS) soak test of four packages; 2) accelerated soak tests in high temperature saline of 28 samples resulting in an extrapolated mean-time-to-failure (MTTF) at 37/spl deg/C of 177 years; 3) a 2.7-year in vitro 97/spl deg/C PBS soak test of a single package; and 4) in situ hermeticity and biocompatibility tests from 12 packages implanted in four guinea pigs-three packages implanted in two guinea pigs (each) for 1 month and another two guinea pigs for 20 and 22 months. All of the packages remained hermetically sealed over the lifetime of the implant. A detailed histological report of the implants is provided suggesting that they elicit no profound adverse reaction from the body.
ISSN:1530-4388
1558-2574
DOI:10.1109/TDMR.2005.854374