Avery Dennison micro-nano replication capabilities for MEMS and microfluidics

Avery Dennison micro-nano replication capabilities for MEMS and microfluidics

Polymers can be used as one of most promising materials for MEMS applications. In this paper, we successfully demonstrated embossing micro-nano structures on polymers, especially high temperature polymers (>300/spl deg/C) by using Avery's unique proprietary embossing technology. Also in this...

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Bibliographische Detailangaben
1. Verfasser: Chu, P.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Biological materials
Costs
Embossing
Heating
MEMS
Microfluidics
Micromechanical devices
Optical materials
Plastics
Polymer
Polymers
Temperature
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Beschreibung
Zusammenfassung:Polymers can be used as one of most promising materials for MEMS applications. In this paper, we successfully demonstrated embossing micro-nano structures on polymers, especially high temperature polymers (>300/spl deg/C) by using Avery's unique proprietary embossing technology. Also in this paper, we demonstrated a roll-to-roll embossing/lamination method for manufacturing low cost plastic microfluidics devices.
DOI:10.1109/ICMENS.2005.29