Investigation of Statistical Variation of the Characteristics of SAW Devices Due to Random Fabrication Errors

The variation of the transfer functions of surface acoustic wave (SAW) interdigital transducers as functions of the statistical errors associated with artwork, the production of photo masks, and other fabrication steps is studied analytically and numerically. Statistical calculations are performed t...

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Veröffentlicht in:	IEEE Trans. Sonics Ultrason.; (United States) 1982-01, Vol.29 (1), p.42-49
Hauptverfasser:	Field, M.E., Chen, C.L.
Format:	Artikel
Sprache:	eng
Schlagworte:	420800 - Engineering- Electronic Circuits & Devices- (-1989) Acoustic transducers Acoustic waves Electrodes ENGINEERING FABRICATION Frequency FUNCTIONS Insertion loss MONTE CARLO METHOD Production RANDOMNESS Surface acoustic wave devices Surface acoustic waves TRANSDUCERS TRANSFER FUNCTIONS
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