Investigation of Statistical Variation of the Characteristics of SAW Devices Due to Random Fabrication Errors

Investigation of Statistical Variation of the Characteristics of SAW Devices Due to Random Fabrication Errors

The variation of the transfer functions of surface acoustic wave (SAW) interdigital transducers as functions of the statistical errors associated with artwork, the production of photo masks, and other fabrication steps is studied analytically and numerically. Statistical calculations are performed t...

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Veröffentlicht in:IEEE Trans. Sonics Ultrason.; (United States) 1982-01, Vol.29 (1), p.42-49
Hauptverfasser: Field, M.E., Chen, C.L.
Format: Artikel
Sprache:eng
Schlagworte:
420800 - Engineering- Electronic Circuits & Devices- (-1989)
Acoustic transducers
Acoustic waves
Electrodes
ENGINEERING
FABRICATION
Frequency
FUNCTIONS
Insertion loss
MONTE CARLO METHOD
Production
RANDOMNESS
Surface acoustic wave devices
Surface acoustic waves
TRANSDUCERS
TRANSFER FUNCTIONS
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Beschreibung
Zusammenfassung:The variation of the transfer functions of surface acoustic wave (SAW) interdigital transducers as functions of the statistical errors associated with artwork, the production of photo masks, and other fabrication steps is studied analytically and numerically. Statistical calculations are performed to determine the effects of random variations of width of the metallic stripes and spacing between stripes on the reflection characteristics of SAW reflectors, insertion loss, and Q of SAW resonators. As expected, the tolerance criterion for resonators is much more stringent than that for reflectors and interdigital transducers. 13 refs.
ISSN:0018-9537
2162-1403
DOI:10.1109/T-SU.1982.31301