Investigation of Statistical Variation of the Characteristics of SAW Devices Due to Random Fabrication Errors
The variation of the transfer functions of surface acoustic wave (SAW) interdigital transducers as functions of the statistical errors associated with artwork, the production of photo masks, and other fabrication steps is studied analytically and numerically. Statistical calculations are performed t...
Gespeichert in:
| Veröffentlicht in: | IEEE Trans. Sonics Ultrason.; (United States) 1982-01, Vol.29 (1), p.42-49 |
|---|---|
| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 49 |
|---|---|
| container_issue | 1 |
| container_start_page | 42 |
| container_title | IEEE Trans. Sonics Ultrason.; (United States) |
| container_volume | 29 |
| creator | Field, M.E. Chen, C.L. |
| description | The variation of the transfer functions of surface acoustic wave (SAW) interdigital transducers as functions of the statistical errors associated with artwork, the production of photo masks, and other fabrication steps is studied analytically and numerically. Statistical calculations are performed to determine the effects of random variations of width of the metallic stripes and spacing between stripes on the reflection characteristics of SAW reflectors, insertion loss, and Q of SAW resonators. As expected, the tolerance criterion for resonators is much more stringent than that for reflectors and interdigital transducers. 13 refs. |
| doi_str_mv | 10.1109/T-SU.1982.31301 |
| format | Article |
| fullrecord | <record><control><sourceid>crossref_RIE</sourceid><recordid>TN_cdi_ieee_primary_1539377</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>1539377</ieee_id><sourcerecordid>10_1109_T_SU_1982_31301</sourcerecordid><originalsourceid>FETCH-LOGICAL-c352t-756881028b6f5cee854e35ae227f9c4efeff4fa6f1224ca056b6be63a826044b3</originalsourceid><addsrcrecordid>eNpFkM1LAzEQxYMoWKtnD16C923zvbvH0g8tFAS31WPIxoldaTeSxIL_vdut6GmGmd97PB5Ct5SMKCXleJ1VmxEtCzbilBN6hgaMKpZRQfg5GhBCi6yUPL9EVzF-EMKJomyA9sv2ADE17yY1vsXe4Sp1a3exZodfTGj-HmkLeLo1wdgEoSdiz09e8QwOjYWIZ1-Ak8fPpn3ze7wwdehsev08BB_iNbpwZhfh5ncO0WYxX08fs9XTw3I6WWWWS5ayXKqioIQVtXLSAhRSAJcGGMtdaQU4cE44oxxlTFhDpKpVDYqbgikiRM2H6P7k67uYOtomgd1a37Zgk5ZCMpXTDhqfIBt8jAGc_gzN3oRvTYk-VqrXutroY6W6r7RT3J0UDQD805KXPM_5D78Wcz4</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Investigation of Statistical Variation of the Characteristics of SAW Devices Due to Random Fabrication Errors</title><source>IEEE Electronic Library (IEL)</source><creator>Field, M.E. ; Chen, C.L.</creator><creatorcontrib>Field, M.E. ; Chen, C.L. ; Purdue Univ, West Lafayette, Indiana, USA</creatorcontrib><description>The variation of the transfer functions of surface acoustic wave (SAW) interdigital transducers as functions of the statistical errors associated with artwork, the production of photo masks, and other fabrication steps is studied analytically and numerically. Statistical calculations are performed to determine the effects of random variations of width of the metallic stripes and spacing between stripes on the reflection characteristics of SAW reflectors, insertion loss, and Q of SAW resonators. As expected, the tolerance criterion for resonators is much more stringent than that for reflectors and interdigital transducers. 13 refs.</description><identifier>ISSN: 0018-9537</identifier><identifier>EISSN: 2162-1403</identifier><identifier>DOI: 10.1109/T-SU.1982.31301</identifier><language>eng</language><publisher>United States: IEEE</publisher><subject>420800 - Engineering- Electronic Circuits & Devices- (-1989) ; Acoustic transducers ; Acoustic waves ; Electrodes ; ENGINEERING ; FABRICATION ; Frequency ; FUNCTIONS ; Insertion loss ; MONTE CARLO METHOD ; Production ; RANDOMNESS ; Surface acoustic wave devices ; Surface acoustic waves ; TRANSDUCERS ; TRANSFER FUNCTIONS</subject><ispartof>IEEE Trans. Sonics Ultrason.; (United States), 1982-01, Vol.29 (1), p.42-49</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c352t-756881028b6f5cee854e35ae227f9c4efeff4fa6f1224ca056b6be63a826044b3</citedby><cites>FETCH-LOGICAL-c352t-756881028b6f5cee854e35ae227f9c4efeff4fa6f1224ca056b6be63a826044b3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1539377$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,776,780,792,881,27901,27902,54733</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1539377$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttps://www.osti.gov/biblio/5452671$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Field, M.E.</creatorcontrib><creatorcontrib>Chen, C.L.</creatorcontrib><creatorcontrib>Purdue Univ, West Lafayette, Indiana, USA</creatorcontrib><title>Investigation of Statistical Variation of the Characteristics of SAW Devices Due to Random Fabrication Errors</title><title>IEEE Trans. Sonics Ultrason.; (United States)</title><addtitle>T-SU</addtitle><description>The variation of the transfer functions of surface acoustic wave (SAW) interdigital transducers as functions of the statistical errors associated with artwork, the production of photo masks, and other fabrication steps is studied analytically and numerically. Statistical calculations are performed to determine the effects of random variations of width of the metallic stripes and spacing between stripes on the reflection characteristics of SAW reflectors, insertion loss, and Q of SAW resonators. As expected, the tolerance criterion for resonators is much more stringent than that for reflectors and interdigital transducers. 13 refs.</description><subject>420800 - Engineering- Electronic Circuits & Devices- (-1989)</subject><subject>Acoustic transducers</subject><subject>Acoustic waves</subject><subject>Electrodes</subject><subject>ENGINEERING</subject><subject>FABRICATION</subject><subject>Frequency</subject><subject>FUNCTIONS</subject><subject>Insertion loss</subject><subject>MONTE CARLO METHOD</subject><subject>Production</subject><subject>RANDOMNESS</subject><subject>Surface acoustic wave devices</subject><subject>Surface acoustic waves</subject><subject>TRANSDUCERS</subject><subject>TRANSFER FUNCTIONS</subject><issn>0018-9537</issn><issn>2162-1403</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1982</creationdate><recordtype>article</recordtype><recordid>eNpFkM1LAzEQxYMoWKtnD16C923zvbvH0g8tFAS31WPIxoldaTeSxIL_vdut6GmGmd97PB5Ct5SMKCXleJ1VmxEtCzbilBN6hgaMKpZRQfg5GhBCi6yUPL9EVzF-EMKJomyA9sv2ADE17yY1vsXe4Sp1a3exZodfTGj-HmkLeLo1wdgEoSdiz09e8QwOjYWIZ1-Ak8fPpn3ze7wwdehsev08BB_iNbpwZhfh5ncO0WYxX08fs9XTw3I6WWWWS5ayXKqioIQVtXLSAhRSAJcGGMtdaQU4cE44oxxlTFhDpKpVDYqbgikiRM2H6P7k67uYOtomgd1a37Zgk5ZCMpXTDhqfIBt8jAGc_gzN3oRvTYk-VqrXutroY6W6r7RT3J0UDQD805KXPM_5D78Wcz4</recordid><startdate>198201</startdate><enddate>198201</enddate><creator>Field, M.E.</creator><creator>Chen, C.L.</creator><general>IEEE</general><scope>AAYXX</scope><scope>CITATION</scope><scope>OTOTI</scope></search><sort><creationdate>198201</creationdate><title>Investigation of Statistical Variation of the Characteristics of SAW Devices Due to Random Fabrication Errors</title><author>Field, M.E. ; Chen, C.L.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c352t-756881028b6f5cee854e35ae227f9c4efeff4fa6f1224ca056b6be63a826044b3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1982</creationdate><topic>420800 - Engineering- Electronic Circuits & Devices- (-1989)</topic><topic>Acoustic transducers</topic><topic>Acoustic waves</topic><topic>Electrodes</topic><topic>ENGINEERING</topic><topic>FABRICATION</topic><topic>Frequency</topic><topic>FUNCTIONS</topic><topic>Insertion loss</topic><topic>MONTE CARLO METHOD</topic><topic>Production</topic><topic>RANDOMNESS</topic><topic>Surface acoustic wave devices</topic><topic>Surface acoustic waves</topic><topic>TRANSDUCERS</topic><topic>TRANSFER FUNCTIONS</topic><toplevel>online_resources</toplevel><creatorcontrib>Field, M.E.</creatorcontrib><creatorcontrib>Chen, C.L.</creatorcontrib><creatorcontrib>Purdue Univ, West Lafayette, Indiana, USA</creatorcontrib><collection>CrossRef</collection><collection>OSTI.GOV</collection><jtitle>IEEE Trans. Sonics Ultrason.; (United States)</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Field, M.E.</au><au>Chen, C.L.</au><aucorp>Purdue Univ, West Lafayette, Indiana, USA</aucorp><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Investigation of Statistical Variation of the Characteristics of SAW Devices Due to Random Fabrication Errors</atitle><jtitle>IEEE Trans. Sonics Ultrason.; (United States)</jtitle><stitle>T-SU</stitle><date>1982-01</date><risdate>1982</risdate><volume>29</volume><issue>1</issue><spage>42</spage><epage>49</epage><pages>42-49</pages><issn>0018-9537</issn><eissn>2162-1403</eissn><abstract>The variation of the transfer functions of surface acoustic wave (SAW) interdigital transducers as functions of the statistical errors associated with artwork, the production of photo masks, and other fabrication steps is studied analytically and numerically. Statistical calculations are performed to determine the effects of random variations of width of the metallic stripes and spacing between stripes on the reflection characteristics of SAW reflectors, insertion loss, and Q of SAW resonators. As expected, the tolerance criterion for resonators is much more stringent than that for reflectors and interdigital transducers. 13 refs.</abstract><cop>United States</cop><pub>IEEE</pub><doi>10.1109/T-SU.1982.31301</doi><tpages>8</tpages></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISSN: 0018-9537 |
| ispartof | IEEE Trans. Sonics Ultrason.; (United States), 1982-01, Vol.29 (1), p.42-49 |
| issn | 0018-9537 2162-1403 |
| language | eng |
| recordid | cdi_ieee_primary_1539377 |
| source | IEEE Electronic Library (IEL) |
| subjects | 420800 - Engineering- Electronic Circuits & Devices- (-1989) Acoustic transducers Acoustic waves Electrodes ENGINEERING FABRICATION Frequency FUNCTIONS Insertion loss MONTE CARLO METHOD Production RANDOMNESS Surface acoustic wave devices Surface acoustic waves TRANSDUCERS TRANSFER FUNCTIONS |
| title | Investigation of Statistical Variation of the Characteristics of SAW Devices Due to Random Fabrication Errors |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-05T13%3A18%3A48IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-crossref_RIE&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Investigation%20of%20Statistical%20Variation%20of%20the%20Characteristics%20of%20SAW%20Devices%20Due%20to%20Random%20Fabrication%20Errors&rft.jtitle=IEEE%20Trans.%20Sonics%20Ultrason.;%20(United%20States)&rft.au=Field,%20M.E.&rft.aucorp=Purdue%20Univ,%20West%20Lafayette,%20Indiana,%20USA&rft.date=1982-01&rft.volume=29&rft.issue=1&rft.spage=42&rft.epage=49&rft.pages=42-49&rft.issn=0018-9537&rft.eissn=2162-1403&rft_id=info:doi/10.1109/T-SU.1982.31301&rft_dat=%3Ccrossref_RIE%3E10_1109_T_SU_1982_31301%3C/crossref_RIE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=1539377&rfr_iscdi=true |