U-type piezoelectric thin-film microactuator for hard disk drives

We have designed, fabricated, and investigated a new dual-stage actuator system based on a thin-film lead-zirconate-titanate (PZT) microactuator and a voice coil motor for positioning a magnetic head in a high-density hard disk drive (HDD). We made the PZT microactuator by using a modified sol-gel technique to deposit PZT thin film and applying reactive ion etching processes to shape the device. We studied the crystalline structure and growth behavior of the piezoelectric films by X-ray diffraction and scanning electron microscopy and found that the PZT material preferably has a composition of Pb(Zr/sub 0.52/Ti/sub 0/.48)O/sub 3/. We also tested and simulated the U-type SUS304 substrate integrated with two single-layer PZT elements in order to investigate the driving mechanics. The device performance is outstanding. With the peak-to-peak head displacement of 1.08 /spl mu/m at the applied voltage of /spl plusmn/20 V and the suspension response frequency higher than 12 kHz, both displacement/voltage sensitivity and resonant frequency are high enough for the device to be used in future high-density HDDs.