GaAsSb DHBT IC technology for RF and microwave instrumentation

A high performance GaAsSb base, InP collector DHBT IC process has been developed for RF, microwave and telecommunications instrumentation. The GaAsSb process achieves f/sub T/ and f/sub max/ values of 185 GHz and 220 GHz respectively, at operating currents of J/sub c/= 1.5 mA//spl mu/m/sup 2/, with...

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Hauptverfasser: Low, T.S., Dvorak, M.W., Farhoud, M., Yeats, R.E., Iwamoto, M., Essilfie, G.K., Engel, T., Keppeler, B., Chang, J.S.C., Hadley, J., Patterson, G., Kellert, F., Moll, N., Bahl, S.R., Hutchinson, C.P., Ehlers, E., Adamski, M.E., Culver, M.K., D'Avanzo, D.C., Shirley, T.
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creator Low, T.S.
Dvorak, M.W.
Farhoud, M.
Yeats, R.E.
Iwamoto, M.
Essilfie, G.K.
Engel, T.
Keppeler, B.
Chang, J.S.C.
Hadley, J.
Patterson, G.
Kellert, F.
Moll, N.
Bahl, S.R.
Hutchinson, C.P.
Ehlers, E.
Adamski, M.E.
Culver, M.K.
D'Avanzo, D.C.
Shirley, T.
description A high performance GaAsSb base, InP collector DHBT IC process has been developed for RF, microwave and telecommunications instrumentation. The GaAsSb process achieves f/sub T/ and f/sub max/ values of 185 GHz and 220 GHz respectively, at operating currents of J/sub c/= 1.5 mA//spl mu/m/sup 2/, with catastrophic on-state breakdown voltages of BVcbx = 9 V at J/sub c/= 1.3 mA//spl mu/m/sup 2/. Typical /spl beta/= 50. The MTTF values of > 1 /spl times/ 10/sup 6/ h at maximum operating conditions (T/sub j/ = 125 /spl deg/C, J/sub c/ = 2.0 mA//spl mu/m/sup 2/) are suitable for instrumentation-grade applications. The DHBTs are integrated with a 3-layer metal chassis including 2 resistor levels and an MIM capacitor. This IC technology is manufactured on a 3" production line for use in Agilent Technologies instrumentation products.
doi_str_mv 10.1109/CSICS.2005.1531760
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2374-8443
language eng
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source IEEE Electronic Library (IEL) Conference Proceedings
subjects Indium phosphide
Instruments
Manufacturing
Microwave integrated circuits
Microwave technology
MIM capacitors
Production
Radio frequency
Radiofrequency integrated circuits
Resistors
title GaAsSb DHBT IC technology for RF and microwave instrumentation
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