Low-cost, high-efficiency 40 Gb/s waveguide photodiodes with selective wet-etch processed spot-size-converter

Low-cost, high-efficiency 40 Gb/s waveguide photodiodes with selective wet-etch processed spot-size-converter

We fabricated spot-size-converter integrated waveguide photodiodes with high responsivity of 0.8 A/W and 3 dB bandwidth of 40 GHz. Selective wet-etch method was employed to realize the required width and depth of tapered waveguide.

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Bibliographische Detailangaben
Hauptverfasser: Yong-Hwan Kwon, Joong-Seon Choe, Kisoo Kim, Kwang-Seong Choi, Byung-Seok Choi, Hogyeong Yun, Jong-Hyun Lee, Jeha Kim
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Absorption
Indium phosphide
Optical coupling
Optical fibers
Optical network units
Optical receivers
Optical sensors
Optical waveguides
Photodiodes
Wet etching
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Beschreibung
Zusammenfassung:We fabricated spot-size-converter integrated waveguide photodiodes with high responsivity of 0.8 A/W and 3 dB bandwidth of 40 GHz. Selective wet-etch method was employed to realize the required width and depth of tapered waveguide.
ISSN:1092-8669
DOI:10.1109/ICIPRM.2005.1517443