Improvement of particle outbreak for chamber wall deterioration

Improvement of particle outbreak for chamber wall deterioration

We used fault detect and classification (FDC) application to collect sensor's data of tool. The origin of particles is specified by correlating the data with plasma parameters. We proved particles were caused by the deterioration of chamber wall. The deterioration is the coat of Al alumilite pe...

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Bibliographische Detailangaben
Hauptverfasser: Kawabata, Y., Watanabe, M., Ohtake, K., Yajima, T., Endou, M., Aoyama, M., Imaoka, K.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Ceramics
Constitution
Data mining
Etching
Fault detection
Particle measurements
Plasma applications
Plasma measurements
Semiconductor devices
Voltage
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Beschreibung
Zusammenfassung:We used fault detect and classification (FDC) application to collect sensor's data of tool. The origin of particles is specified by correlating the data with plasma parameters. We proved particles were caused by the deterioration of chamber wall. The deterioration is the coat of Al alumilite peels off from chamber wall. After recoating the coat of Al alumilite on chamber wall, the outbreak of particles reduced.
ISSN:1523-553X
DOI:10.1109/ISSM.2005.1513412