Significant improvement of LPCVD nitride furnace availability by dedicating "thick" and "thin" processes

Significant improvement of LPCVD nitride furnace availability by dedicating "thick" and "thin" processes

At IBM East Fishkill's 300 mm multi-part ASCIX fab, the LPCVD nitride furnace sector failed to meet its manufacturing availability target after its full production ramp early in 2005. The 8% SPC failure rate in foreign material (FM) was the top downtime detractor resulting in an overall sector...

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Bibliographische Detailangaben
Hauptverfasser: Fugardi, S.G., Higgins, P.J., Hansen, M.A., Chan, J.K.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Availability
Boats
Condition monitoring
Contamination
Furnaces
Manufacturing processes
Parallel robots
Production
Productivity
Stress
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Beschreibung
Zusammenfassung:At IBM East Fishkill's 300 mm multi-part ASCIX fab, the LPCVD nitride furnace sector failed to meet its manufacturing availability target after its full production ramp early in 2005. The 8% SPC failure rate in foreign material (FM) was the top downtime detractor resulting in an overall sector availability 20% below plan. Installing new furnaces was not an option, so fundamental changes in the sector operation were required
ISSN:1523-553X
DOI:10.1109/ISSM.2005.1513310