ZrO2 Gate Dielectrics Prepared by E-beam Deposition of Zr and YSZ Films and Post Annealing Processes
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| creator | Johansson, M. Yousif, M.Y.A. Sareen, A. Lundgren, P. Bengtsson, S. Sodervall, U. |
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| doi_str_mv | 10.1109/ESSDERC.2002.194957 |
| format | Conference Proceeding |
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| ispartof | 32nd European Solid-State Device Research Conference, 2002, p.419-422 |
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| language | eng |
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| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Annealing Applied sciences Compound structure devices Dielectrics Electronics Exact sciences and technology Materials Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Zirconium |
| title | ZrO2 Gate Dielectrics Prepared by E-beam Deposition of Zr and YSZ Films and Post Annealing Processes |
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