Design and fabrication of micro carbon nanotube column for electron-beam lithography

This articles describes the preliminary design and fabrication results of micro carbon-nano-tube (CNT) column for electron-beam lithography. The column consists of gated single vertical aligned CNT electron source and one metal electrostatic lens. The CNT electron source was fabricated by combinatio...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Yao, B.C., Wang, C.P., Tseng, S.C., Tsai, C.H.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Carbon nanotubes Electron optics Electron sources Electrostatics Lenses Lithography Optical coupling Optical device fabrication Plasma chemistry Writing
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